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Characterization of DLC films obtained at room temperature by pulsed-dc PECVD

✍ Scribed by Corbella, C.; Vives, M.; Oncins, G.; Canal, C.; Andújar, J.L.; Bertran, E.

Book ID
118233833
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
302 KB
Volume
13
Category
Article
ISSN
0925-9635

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