A comparison of DLC film properties obtained by r.f. PACVD, IBAD, and enhanced pulsed-DC PACVD

✍ Scribed by V.J. Trava-Airoldi; L.F. Bonetti; G. Capote; L.V. Santos; E.J. Corat

• Book ID: 104094078
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 387 KB
• Volume: 202
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2007.06.030