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Microstructure and mechanical properties of a-B1−xNx:H films prepared by r.f. PACVD

✍ Scribed by E.H.A. Dekempeneer; J. Meneve; S. Kuypers; J. Smeets


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
498 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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