✦ LIBER ✦
Self-sustained bridges of a-SiC:H films obtained by PECVD at low temperatures for MEMS applications
✍ Scribed by M.N.P. Carreño; A.T. Lopes
- Book ID
- 116667766
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 543 KB
- Volume
- 338-340
- Category
- Article
- ISSN
- 0022-3093
No coin nor oath required. For personal study only.