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Characterization of chemically prepared Si-surfaces by uv-vis and IR spectroscopic ellipsometry and surface photovoltage

✍ Scribed by H. Angermann; W. Henrion; M. Rebien; J.-T. Zettler; A. Röseler


Book ID
117217567
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
653 KB
Volume
388
Category
Article
ISSN
0039-6028

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The evolution of dangling bond defects on initially H-terminated Si(111) surfaces was correlated to the wet-chemical oxide growth on an atomic scale. The dangling bond induced distribution of interface states was monitored by surface photovoltage measurements. Spectroscopic ellipsometry was used for