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Characterization of boron carbon nitride film modified by excimer laser annealing

✍ Scribed by Hidemitsu Aoki; Kazutoshi Ohyama; Hiroshi Sota; Toshiaki Seino; Chiharu Kimura; Takashi Sugino

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 363 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.06.035

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