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Characterization and properties of GaN films deposited by middle-frequency magnetron sputtering with anode-layer ion source assistance

โœ Scribed by C.W. Zou; J. Zhang; W. Xie; L.X. Shao; L.P. Guo; D.J. Fu


Book ID
113940837
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
819 KB
Volume
86
Category
Article
ISSN
0042-207X

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