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Study on oxygen source and its effect on film properties of ZnO deposited by radio frequency magnetron sputtering

✍ Scribed by Yudai Kamada; Mamoru Furuta; Takahiro Hiramatsu; Toshiyuki Kawaharamura; Dapeng Wang; Shin-ichi Shimakawa; Chaoyang Li; Shizuo Fujita; Takashi Hirao

Book ID: 116244581
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 895 KB
Volume: 258
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2011.07.100

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