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Characterization and production metrology of gate dielectric films

โœ Scribed by Alain C. Diebold; Jesse Canterbury; Will Chism; Curt Richter; Nhan Nguyen; Jim Ehrstein; Chad Weintraub

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
188 KB
Volume
4
Category
Article
ISSN
1369-8001

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