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Characteristics of AlN Films Grown on Thermally-Nitrided Sapphire Substrates

✍ Scribed by Ueno, Kohei; Ohta, Jitsuo; Fujioka, Hiroshi; Fukuyama, Hiroyuki

Book ID
120010817
Publisher
Institute of Pure and Applied Physics
Year
2010
Tongue
English
Weight
765 KB
Volume
4
Category
Article
ISSN
1882-0778

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## Abstract We have demonstrated the first single‐crystal growth of AlN films on Fe substrates using pulsed laser deposition and in‐vestigated their structural properties. Stepped and terraced surfaces of the Fe(110) substrates have been achieved by UHV annealing. Although a low quality AlN film, w