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Effect of growth stoichiometry on the structural properties of AlN films on thermally nitrided sapphire $(11\bar 20)$

✍ Scribed by Ueno, Kohei; Kishikawa, Eiji; Inoue, Shigeru; Ohta, Jitsuo; Fujioka, Hiroshi; Oshima, Masaharu; Fukuyama, Hiroyuki

Book ID: 125436809
Publisher: John Wiley and Sons
Year: 2013
Tongue: English
Weight: 401 KB
Volume: 8
Category: Article
ISSN: 1862-6254
DOI: 10.1002/pssr.201308275

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