Hardness, elastic modulus and structure of indium nitride thin films on AlN-nucleated sapphire substrates

✍ Scribed by J. H EDGAR; C. H WEI; D. T SMITH; T. J KISTENMACHER; W. A BRYDEN

• Book ID: 110373033
• Publisher: Springer US
• Year: 1997
• Tongue: English
• Weight: 670 KB
• Volume: 8
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1023/a:1018587306451