Characterisation of InGaAs/GaAs superlattice structures by X-ray double crystal diffraction

✍ Scribed by M.C. Shrivastava; S. Swaminathan

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 195 KB
• Volume: 19
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(88)80136-8

✦ Synopsis

Experimental X-ray double crystal diffraction rocking curves for different InGaAs/ GaAs superlattices grown by molecular beam epitaxy (MBE) and metal-organic chemical vapour deposition (MOCVD) are used to obtain theoretically calculated rocking curves, based on Takagi's theory of dynamic X-ray diffraction of a distorted crystal. A detailed assessment and accurate information about these superlattice structures are possible by a comparison of the experimental and theoretical curves. A comparison is also made between theoretical rocking curves obtained by dynamic and kinematical approaches.