✦ LIBER ✦

Channeling effect of P implantation in Si(100)

✍ Scribed by Yu Ning; Chu Wei-Kan; Bijoy Patnaik; Nalin Parikh; Sean Corcoran; Charles Kirschbaum; Kody Varahramyan

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Channeling control for large tilt angle

✍ Robert B. Simonton; Dennis E. Kamenitsa; Andrew M. Ray; Changhae Park; Kevin M. 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 650 KB

Channeling effect for low energy ion imp

✍ K. Cho; W.R. Allen; T.G. Finstad; W.K. Chu; J. Liu; J.J. Wortman 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 680 KB

Secondary defect reduction by channeling

✍ V. Raineri; R.J. Schreutelkamp; F.W. Saris; R.E. Kaim; K.T.F. Janssen 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 496 KB

Channeling effects in high energy ion im

✍ M. Berti; G. Brusatin; A. Carnera; A. Gasparotto; R. Fabbri 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 270 KB

Channeling implantation of B and P in si

✍ R.J. Schreutelkamp; V. Raineri; F.W. Sans; R.E. Kaim; J.F.M. Westendorp; P.F.H.M 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 440 KB

Ion channeling study of P implantation d

✍ G. Leo; A. Traverse; M.O. Ruault; A.V. Drigo 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 634 KB