Channeling control for large tilt angle implantation in Si 〈100〉

✍ Scribed by Robert B. Simonton; Dennis E. Kamenitsa; Andrew M. Ray; Changhae Park; Kevin M. Klein; Al F. Tasch

• Book ID: 113282351
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 650 KB
• Volume: 55
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(91)96132-5