✦ LIBER ✦
RBS-channeling spectra: simulation of as-implanted Si samples through an empirical formula for 〈100〉 axial dechanneling of He in silicon
✍ Scribed by M. Bianconi; R. Nipoti; M. Cantiano; A. Gasparotto; A. Sambo
- Book ID
- 113285407
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 460 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0168-583X
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