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CexAlyOz/TiN stack analysis for Metal–Insulator–Metal applications: Effect of annealing and the metal electrode deposition method

✍ Scribed by C. Baristiran Kaynak; M. Lukosius; B. Tillack; Ch. Wenger; A. Abrutis; M. Skapas


Book ID
113937407
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
1006 KB
Volume
520
Category
Article
ISSN
0040-6090

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