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Cathodoluminescence depth analysis in SiO2-Si-systems

✍ Scribed by M. Goldberg; T. Barfels; H.-J. Fitting


Book ID
105897284
Publisher
Springer
Year
1998
Tongue
English
Weight
82 KB
Volume
361
Category
Article
ISSN
1618-2650

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Si-rich-SiO 2 layers with excess silicon of 45-50% were grown by RF magnetron co-sputtering from pure SiO 2 and Si targets and were studied by Raman scattering, HRTEM, electron-paramagnetic resonance and X-ray diffraction (XRD) methods as well as by photo-voltage technique operated at different temp