✦ LIBER ✦

Cathode Unit of Magnetron Sputter for High Target Utilization

✍ Scribed by Park, Jang Sick; Park, Lee Soon; Lee, Yun-Su; Lee, Won Geon; Jung, Min Ki

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Performance characteristics of a new hig

✍ Walter H. Class 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 318 KB

Target material pathways model for high

✍ Christie, D. J. 📂 Article 📅 2005 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 334 KB

Virtual Design and Visual Simulation of

✍ Zhang, Yi Chen; Li, Can Lun; Li, Xin Ying; Li, Hui 📂 Article 📅 2011 🏛 Trans Tech Publications, Ltd. ⚖ 498 KB

A method of increasing the utilization r

✍ Yang Yong-Kang 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Deposition of Co-Cr films by magnetron s

✍ Takahashi, T.; Hata, T.; Naoe, M. 📂 Article 📅 1990 🏛 IEEE 🌐 English ⚖ 302 KB

Calculation of the erosion profile of a

✍ I. Yu. Burmakinskii; A. V. Rogov 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 79 KB