✦ LIBER ✦

A method of increasing the utilization ratio of planar magnetron sputtering targets

✍ Scribed by Yang Yong-Kang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Performance of a planar magnetron sputte

✍ Qing-Ming Chen; Yu-Dian Fan; Heng-De Li 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 903 KB

The characteristics of a modified planar

✍ KI Kirov; SS Georgiev; NA Ivanov; GM Minchev 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 316 KB

Observations on the operation of a plana

✍ Tatsuo Fukami; Fumihiko Shintani; Masahiko Naoe 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 567 KB

3857. The characteristics of a modified

📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 139 KB

Angular distribution of atoms during the

✍ Yu. V. Martynenko; A. V. Rogov; V. I. Shul’ga 📂 Article 📅 2012 🏛 Springer 🌐 English ⚖ 474 KB

The influence of the target age on later

✍ Thomas Welzel; Klaus Ellmer 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 985 KB