✦ LIBER ✦

Virtual Design and Visual Simulation of Cathode Target on Magnetron Sputtering Coater

✍ Scribed by Zhang, Yi Chen; Li, Can Lun; Li, Xin Ying; Li, Hui

Book ID: 125421137
Publisher: Trans Tech Publications, Ltd.
Year: 2011
Weight: 498 KB
Volume: 2-3
Category: Article
ISSN: 2234-991X
DOI: 10.4028/www.scientific.net/aef.2-3.1088

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