[IEEE 2011 International Conference on Electrical Machines and Systems (ICEMS) - Beijing, China (2011.08.20-2011.08.23)] 2011 International Conference on Electrical Machines and Systems - Design of a rectangular DC magnetron sputtering system with controllable target erosion patterns

[IEEE 2011 International Conference on E

✍ Wang, Ende; Huang, Shenghua 📂 Article 📅 2011 🏛 IEEE ⚖ 462 KB

[IEEE 2011 International Conference on E

✍ Bai, Baodong; Kang, Bo; Zhang, Zhijia; Chen, Dezhi 📂 Article 📅 2011 🏛 IEEE ⚖ 275 KB

[IEEE 2011 International Conference on E

✍ Morozumi, Kazuyoshi; Miki, Ichiro; Kubota, Hisao; Matsuse, Kouki 📂 Article 📅 2011 🏛 IEEE ⚖ 528 KB

[IEEE 2011 International Conference on E

✍ Xuan, Hung Vu; Lahaye, D.; Ani, S. O.; Polinder, H.; Ferreira, J. A. 📂 Article 📅 2011 🏛 IEEE ⚖ 770 KB

[IEEE 2011 International Conference on E

✍ Qu, Bingni; Song, Jiancheng; Jia, Huiyong; Jin, Zhixin 📂 Article 📅 2011 🏛 IEEE ⚖ 309 KB

[IEEE 2011 International Conference on E

✍ Lee, Kyu Sang; Lee, Hee Jun; Sin, Soo Cheol; Kim, Jin Hong; Lee, Taeck Kie; Won, 📂 Article 📅 2011 🏛 IEEE ⚖ 651 KB