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Catalytic growth of ZnO nanostructures by r.f. magnetron sputtering

✍ Scribed by María Arroyo-Hernández; Raquel Álvaro; Sheila Serrano; José Luis Costa-Krämer

Book ID
115021141
Publisher
Springer-Verlag
Year
2011
Tongue
English
Weight
546 KB
Volume
6
Category
Article
ISSN
1931-7573

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Deposition of ZnO inclinedc-axis on sili
Deposition of ZnO inclinedc-axis on silicon and diamond by r.f. magnetron sputtering
✍ Bensmaine, S. ;Le Brizoual, L. ;Elmazria, O. ;Fundenberger, J. J. ;Benyoucef, B. 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 176 KB

## Abstract Suitable deposition conditions yielding to thin zinc oxide (ZnO) films with inclined __c__‐axis have been determined in this work. These films were deposited on silicon (100) and on the nucleation side of self‐standing diamond substrates. We used r.f. magnetron and a zinc‐oxyde target.