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Carbon nitride thin-films deposited from coupled r.f.-magnetron sputtering and ion beam-assisted processes

✍ Scribed by Andújar, J.L; Pino, F.J; Polo, M.C; Bertran, E


Book ID
122000196
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
126 KB
Volume
10
Category
Article
ISSN
0925-9635

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