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Effects of gas pressure and r.f. power on the growth and properties of magnetron sputter deposited amorphous carbon thin films

✍ Scribed by Andújar, J.L.; Pino, F.J.; Polo, M.C.; Pinyol, A.; Corbella, C.; Bertran, E.


Book ID
121437417
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
108 KB
Volume
11
Category
Article
ISSN
0925-9635

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