Deposition of an InN thin film by a r.f. plasma-assisted reactive ion-beam sputtering deposition (R-IBSD) technique

✍ Scribed by Shinoda, Hiroyuki; Mutsukura, Nobuki

• Book ID: 123235611
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 270 KB
• Volume: 11
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(01)00679-3