Effect of the deposition rate on ITO thi
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Meng, Li-Jian ;Teixeira, V. ;dos Santos, M. P.
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Article
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2010
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John Wiley and Sons
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English
⚖ 507 KB
## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1–0.3 nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite