𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Carbon nanotube tips for scanning probe microscopy: fabrication and high aspect ratio nanometrology

✍ Scribed by Nguyen, Cattien V; Ye, Qi; Meyyappan, M


Book ID
111865835
Publisher
Institute of Physics
Year
2005
Tongue
English
Weight
460 KB
Volume
16
Category
Article
ISSN
0957-0233

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Application of scanning probe microscopy
✍ S. Achenbach; J. Mohr; F.J. Pantenburg πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 677 KB

Deep X-ray lithography is a well known technique to fabricate microoptical systems. The performance of these systems, especially microspectrometers, strongly depends on the structural accuracy. To characterize the structural details of gratings of differently processed LIGA microspectrometers, we ap