High Aspect Ratio Nanometrology using Carbon Nanotube Probes in Atomic Force Microscopy

✍ Scribed by F.Z. Fang; Z.W. Xu; S. Dong; G.X. Zhang

• Book ID: 108094920
• Publisher: International Academy for Production Engineering
• Year: 2007
• Tongue: English
• Weight: 681 KB
• Volume: 56
• Category: Article
• ISSN: 0007-8506
• DOI: 10.1016/j.cirp.2007.05.127