✦ LIBER ✦

Application of scanning probe microscopy for the determination of the structural accuracy of high aspect ratio microstructures

✍ Scribed by S. Achenbach; J. Mohr; F.J. Pantenburg

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 677 KB
Volume: 53
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(00)00394-4

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✦ Synopsis

Deep X-ray lithography is a well known technique to fabricate microoptical systems. The performance of these systems, especially microspectrometers, strongly depends on the structural accuracy. To characterize the structural details of gratings of differently processed LIGA microspectrometers, we applied a high resolution atomic force microscope (Digital Instruments Dimension 3100). Structural details of the sidewall of the microspectrometer grating were evaluated by AFM measurements as a function of resist/developer parameters and the lateral and vertical location on the microstructure. The measurements revealed considerable differences in step heights and opening angles of the gratings. The results coincide with measurements of the optical performance of the differently processed spectrometers.

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