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The electrodeposition of cobalt–nickel–iron high aspect ratio thick film structures for magnetic MEMS applications

✍ Scribed by Yelena Sverdlov; Yuri Rosenberg; Yu.I. Rozenberg; Ron Zmood; Raviv Erlich; Sivan Natan; Yosi Shacham-Diamand


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
498 KB
Volume
76
Category
Article
ISSN
0167-9317

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