Junction capacitance studies of deep def
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J.D. Cohen; A.V. Gelatos; K.K. Mahavadi; K. Zellama
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Article
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1988
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Elsevier Science
โ 630 KB
Recent results obtained by applying two methods, drive-level capacitance profiling and transient photocapacitance spectroscopy, to the study of deep defects in undoped hydrogenated amorphous silicon (a-Si:H) are reviewed. From the first method, we illustrate how it is possible to obtain the density,