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Cantilever beam accelerometer based on surface micromachining technology

✍ Scribed by Fricke, J; Obermeier, E

Book ID: 120177665
Publisher: Institute of Physics
Year: 1993
Tongue: English
Weight: 267 KB
Volume: 3
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/3/4/005

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