✦ LIBER ✦
Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
✍ Scribed by Jian-qiang Han, Ri-sheng Feng, Yan Li, Sen-lin Li, Qing Li
- Book ID
- 119923416
- Publisher
- SP Zhejiang University Press
- Year
- 2013
- Tongue
- English
- Weight
- 823 KB
- Volume
- 14
- Category
- Article
- ISSN
- 1869-1951
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