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Theoretical limits on the freestanding length of cantilevers produced by surface micromachining technology

✍ Scribed by Johnstone, Robert W; Parameswaran, M

Book ID: 121775219
Publisher: Institute of Physics
Year: 2002
Tongue: English
Weight: 353 KB
Volume: 12
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/12/6/317

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