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C-axis orientation of Co-Cr thin films by facing targets sputtering

✍ Scribed by Niimura, Y.; Nakagawa, S.; Naoe, M.

Book ID: 114648245
Publisher: IEEE
Year: 1986
Tongue: English
Weight: 516 KB
Volume: 22
Category: Article
ISSN: 0018-9464
DOI: 10.1109/tmag.1986.1064343

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