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Control of nano-structure of the initial growth layers of Co–Cr thin films deposited by facing targets sputtering

✍ Scribed by Shigeki Nakagawa; Masahiko Naoe

Book ID: 108390464
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 504 KB
Volume: 51
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(98)00255-3

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## Abstract Single‐phase β‐ and α‐FeSi~2~ thin films can be grown on Si(100) with and without a thin Fe buffer layer by adopting a facing target radio‐frequency magnetron sputtering method. The role of the buffer layer on the formation of β‐ and α‐FeSi~2~ thin film was discussed. The composition of