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Bulk micromachining of SiC substrate for MEMS sensor applications

✍ Scribed by Vanko, Gabriel; Hudek, Peter; Zehetner, Johann; Dzuba, Jaroslav; Choleva, Pavlina; Kutiš, Vladimír; Vallo, Martin; Rýger, Ivan; Lalinský, Tibor

Book ID
120444903
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
765 KB
Volume
110
Category
Article
ISSN
0167-9317

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Single crystalline silicon carbide (SiC) in bulk or thin film form has the potential to be a durable and reliable MEMS pressure sensor in high-temperature and harsh chemical environments. Laser micromachining can fabricate SiC diaphragms for pressure sensors much faster than electrochemical etching,