✦ LIBER ✦

Bright field alignment marks for optical lithography

✍ Scribed by U. Ablaβmeier

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Composition and detection of alignment m

📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 148 KB

CMOS compatible alignment marks for the

✍ R.C. Farrow; W.K. Waskiewicz; I. Kizilyalli; L. Ocola; J. Felker; C. Biddick; G. 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 562 KB

Application of X-ray steppers using opti

✍ H. Huber; U. Scheunemann; W. Rohrmoser; E. Cullmann 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 239 KB

Near-field optical lithography method fo

✍ V.F. Dryakhlushin; A.Yu. Klimov; V.V. Rogov; N.V. Vostokov 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 183 KB

Analysis and optimization of multilayer

✍ David O.S. Melville; Richard J. Blaikie 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 449 KB

Certification of sighting marks for opti

✍ E. M. Vainer 📂 Article 📅 1974 🏛 Springer 🌐 English ⚖ 310 KB