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Near-field optical lithography method for fabrication of the nanodimensional objects

✍ Scribed by V.F. Dryakhlushin; A.Yu. Klimov; V.V. Rogov; N.V. Vostokov

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
183 KB
Volume
248
Category
Article
ISSN
0169-4332

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