Bottom electrode dependence of the properties of (Ba,Sr)TiO3 thin film capacitors
β Scribed by Young Chul Choi; Byung Soo Lee
- Book ID
- 114194706
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 327 KB
- Volume
- 61
- Category
- Article
- ISSN
- 0254-0584
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Ba, Sr)TiO (BST) thin-film capacitors with Ir bottom electrodes are recognized to have higher polarization 3 and leakage current as compared to those with conventional Pt electrodes. This paper describes a method to improve the leakage current of BST / Ir films by high-density plasma surface treatme
Interdigitated capacitors haΒ¨e been fabricated on ferroelectric thin films of Sr Ba TiO . These deΒ¨ices haΒ¨e been characterized 0 .5 0 .5 3 at microwaΒ¨e frequencies from 50 MHz to 20 GHz, and haΒ¨e a 3.4:1 tuning range oΒ¨er a 1α40 V bias range. This is shown to originate from a relatiΒ¨e dielectric co