Microwave properties of Sr0.5Ba0.5TiO3 thin-film interdigitated capacitors

✍ Scribed by S. W. Kirchoefer; J. M. Pond; A. C. Carter; W. Chang; K. K. Agarwal; J. S. Horwitz; D. B. Chrisey

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 144 KB
• Volume: 18
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/(sici)1098-2760(19980620)18:3<168::aid-mop3>3.0.co;2-d

✦ Synopsis

Interdigitated capacitors ha¨e been fabricated on ferroelectric thin films of Sr Ba TiO . These de¨ices ha¨e been characterized 0 .5 0 .5 3 at microwa¨e frequencies from 50 MHz to 20 GHz, and ha¨e a 3.4:1 tuning range o¨er a 1᎐40 V bias range. This is shown to originate from a relati¨e dielectric constant tuning of 3.8:1. The microwa¨e losses exhibited by these capacitors are comparable to those of commercially a¨ailable semiconductor ¨aractors for frequencies greater than 1 GHz, and should be useful for tunable microwa¨e circuits in some 300 K *Currently with Texas Instruments, Inc., Plano, Texas.