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Boiling KOH Etching Behavior of GaN Buffer and Epitaxial Layers on Sapphire Substrate – Effects of Substrate-Surface Nitridation and Carrier Gas

✍ Scribed by A. Yamamoto; K. Ikuta; Y. Murakami; T. Yamauchi; A. Hashimoto; Y. Ito

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 189 KB
Volume: 0
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200390011

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