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Blistering of implanted crystalline silicon by plasma hydrogenation investigated by Raman scattering spectroscopy

✍ Scribed by Dungen, W.; Job, R.; Mueller, T.; Ma, Y.; Fahrner, W. R.; Keller, L. O.; Horstmann, J. T.; Fiedler, H.

Book ID
118118329
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
673 KB
Volume
100
Category
Article
ISSN
0021-8979

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