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Bimodal distribution of damage morphology generated by ion implantation

✍ Scribed by K.R.C. Mok; M. Jaraiz; I. Martin-Bragado; J.E. Rubio; P. Castrillo; R. Pinacho; M.P. Srinivasan; F. Benistant

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 205 KB
Volume: 124-125
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2005.08.099

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