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Beryllium and sulfur ion-implanted profiles in gaas

✍ Scribed by James Comas; Larry Plew


Book ID
112812557
Publisher
Springer US
Year
1976
Tongue
English
Weight
489 KB
Volume
5
Category
Article
ISSN
0361-5235

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High purity beryllium samples were loaded with deuterium by ion-implantation at 25Β°C or by thermal absorption in D e gas at 300-500Β°C. The samples were then thermally ramped up to 800Β°C at rates of 2-3Β°C/min, and the released deuterium measured as a function of temperature using a mass spectrometer.