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Berkovich nanoindentation on InP

โœ Scribed by Sheng-Rui Jian; Jason Shian-Ching Jang

Book ID
116605050
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
557 KB
Volume
482
Category
Article
ISSN
0925-8388

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The deformation mechanisms of GaN thin films obtained by metal-organic chemical vapor deposition (MOCVD) method were studied using nanoindentation with a Berkovich diamond indenter, micro-Raman spectroscopy and the cross-sectional transmission electron microscopy (XTEM) techniques. Due to the sharpn