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Mechanical Deformation Behavior of Nonpolar GaN Thick Films by Berkovich Nanoindentation

โœ Scribed by Tongbo Wei; Qiang Hu; Ruifei Duan; Junxi Wang; Yiping Zeng; Jinmin Li; Yang Yang; Yulong Liu


Book ID
107470438
Publisher
Springer-Verlag
Year
2009
Tongue
English
Weight
293 KB
Volume
4
Category
Article
ISSN
1931-7573

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The deformation mechanisms of GaN thin films obtained by metal-organic chemical vapor deposition (MOCVD) method were studied using nanoindentation with a Berkovich diamond indenter, micro-Raman spectroscopy and the cross-sectional transmission electron microscopy (XTEM) techniques. Due to the sharpn