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Mechanical Deformation Induced in Si and GaN Under Berkovich Nanoindentation

โœ Scribed by Sheng-Rui Jian


Book ID
107470238
Publisher
Springer-Verlag
Year
2007
Tongue
English
Weight
423 KB
Volume
3
Category
Article
ISSN
1931-7573

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Berkovich nanoindentation and deformatio
โœ Chien-Huang Tsai; Sheng-Rui Jian; Jenh-Yih Juang ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 563 KB

The deformation mechanisms of GaN thin films obtained by metal-organic chemical vapor deposition (MOCVD) method were studied using nanoindentation with a Berkovich diamond indenter, micro-Raman spectroscopy and the cross-sectional transmission electron microscopy (XTEM) techniques. Due to the sharpn