Berkovich nanoindentation and deformatio
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Chien-Huang Tsai; Sheng-Rui Jian; Jenh-Yih Juang
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Article
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2008
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Elsevier Science
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English
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The deformation mechanisms of GaN thin films obtained by metal-organic chemical vapor deposition (MOCVD) method were studied using nanoindentation with a Berkovich diamond indenter, micro-Raman spectroscopy and the cross-sectional transmission electron microscopy (XTEM) techniques. Due to the sharpn