Behavior of oxygen in the crystal formation and heat treatment of silicon heavily doped with antimony

✍ Scribed by T. Nozaki; Y. Itoh; T. Masui; T. Abe

• Book ID: 123616068
• Publisher: American Institute of Physics
• Year: 1986
• Tongue: English
• Weight: 551 KB
• Volume: 59
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.337005